Rapid Thermal Processing for Future Semiconductor Devices License:perpetual defined on it

defined on it

from classic materials to fullerenes

from the defective gene to its function and repair

This book contains the proceedings of EXPLOMET™ 2000

The scope of this book is based on the conference

Rapid Thermal Processing for Future Semiconductor Devices License:perpetual defined on itThis volume is a collection of papers which were presented at the 2001 International Conference on Rapid Thermal Processing (RTP 2001) held at Ise Shima, Mie, on November 14 16, 2001. This symposium is second conference followed the previous successful first International RTP conference held at Hokkaido in 1997. The RTP 2001 covered the latest developments in RTP and other short time processing continuously aiming to point out the future direction in