Sputtering by Particle Bombardment III formatIsbn:Softcover - 9783662311042 Note: sehr gut 1

Note: sehr gut 1

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Im Folgenden werden die für dieses Verfahren nötigen Annahmen und Tests ausführlich erläutert

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Sputtering by Particle Bombardment III formatIsbn:Softcover - 9783662311042 Note: sehr gut 1Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This is the third and final volume of a comprehensive review on sputtering. Whereas the first two volumes deal primarily with physical aspects such as the theory of sputtering, experimentally observed sputtering yields and surface